China has developed new gas sensor preparation technology
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[ Instrument R & D ] Recently, a team led by Professor Lu Hongliang, School of Microelectronics, Fudan University, combined the hard template method, atomic layer deposition technology and hydrothermal process for the first time to synthesize single-layer ordered SnO2 nanometers on low power MEMS devices Bowl-branched ZnO nanowire multi-level heterogeneous composite nanomaterials are used as gas sensors to achieve ultra-sensitive and highly selective detection of hydrogen sulfide at concentrations as low as 1 ppm.
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It is reported that the current common sensor preparation technology is to print or drip nano-sensing materials onto ceramic tubes or MEMS devices, which greatly limits the reliability and repeatability of the sensor. Therefore, a preparation technology that can seamlessly integrate nano-sensing materials and MEMS micro-heating substrates is critical to the development of high-performance gas sensors with high stability and low power consumption.
This time, the researchers studied and designed the MEMS-type single-layer ordered SnO2 nanobowl branched ZnO nanowire device at 250oC operating temperature, the response to 1ppm hydrogen sulfide (Ra / Rg) is as high as 6.24, and the response change rate (5.24 ) Is about 2.6 times that of single-layer ordered SnO2 nano-bowl devices, and has a faster response / recovery speed.
At the same time, the research also proves that the MEMS-type single-layer ordered SnO2 nanobowl branched ZnO nanowire device has good long-term stability and repeatability. The multi-level heterostructure not only effectively increases the specific surface area of ​​the material, but also improves the gas adsorption capacity of the material, and at the same time, the heterojunction improves the gas-sensitive response capability of the material.
It is understood that the research team's sensing materials are prepared on the MEMS device in situ, and it also has the advantages of low power consumption and integration. It provides technical support for the development of high sensitivity and high stability gas sensors in the field of gas monitoring.
At present, the relevant results are published in the international journal Microsystems & Nanoengineering. This journal is published by the Institute of Electronics of the Chinese Academy of Sciences in cooperation with the original Nature Publishing Group.

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